A. P. Rubshtein, Yu. V. Korkh, A. B. Vladimirov, A. B. Rinkevich, S. A. Plotnikov
STUDYING NANOCOMPOSITE FILMS WITH A MATRIX-FORMING CARBON BY KELVIN PROBE FORCE MICROSCOPY
Nanocomposite TiC/a-C and diamond-like carbon a-C films obtained by vacuum ion-plasma method have been studied by Kelvin Probe force microscopy. Films of thickness 200 nm were deposited on silicon wafers. The structure and composition of nanocomposite TiC/a-C films were varied by deposition conditions. It is shown that the average surface potential VSPav depends on the pulse frequency of graphite target sputtering during film deposition. Amount of sp3 bonded carbon on the film surface increases with scale up frequency. The VSPav of TiC/a-C nanocomposite films depends on phase composition (Ti, TiC, a-C) and their ratio. The numerical calculated volume fractions of the phases in the TiC/a-C films correlates with VSPav.
Keywords: nanocomposite films, diamond-like carbon, titanium carbide, Kelvin probe force microscopy, average surface potential